SEMICONDUCTOR MANUFACTURING SOLUTIONS
Optimizing semiconductor production with customized designs for epitaxial reactors and furnaces. We combine high-purity sensor manufacturing with cost-effective refurbishment and wire bank services to maximize your budget. From our accredited calibration labs to our clean-room assembly, our solutions are engineered to meet the industry’s most rigorous standards.
HIGH-PURITY INSULATORS
To prevent contamination, we utilize insulators with 99.5% purity or better. These are fired to strictly remove all organic impurities before the assembly process begins.
SEMICONDUCTOR-GRADE QUARTZ
We offer quartzware in Premium, Enhanced, and Standard OEM Quality tiers, allowing you to match the material specifically to your performance requirements.
CLEAN ROOM MANUFACTURING
Production occurs in state-of-the-art assembly cells. This rigorous environment minimizes airborne particles and enables us to meet the highest industry standards.
PRECISION LASER WELDING
We create microscopic junctions using laser welding to minimize the Heat Affected Zone (HAZ). This critical step prevents damage to small-diameter wires during construction.
NIST-TRACEABLE CALIBRATION
Reliability is verified via comparison techniques defined by ASTM E220. All calibrations are fully traceable to the National Institute of Standards and Technology.
GLOBAL CERTIFICATIONS
ISO 9001:2015, ISO 14001:2015, and ISO 45001:2018 certifications, as well as an RvA-accredited ISO/IEC 17025:2015 calibration laboratory,
COMPLETE TRACEABILITY
We ensure total accountability through laser-engraved serial numbers on every connector. This allows for traceability of every sensor.
Trusted Partner
We are a trusted/approved partner to major semiconductor end-users and manufacturers such as ASM, NXP Semiconductors, ST Microelectronics, Soitec, Hitachi, and Mitsubishi.
Engineered for Precision
UNRIVALED MATERIAL PURITY
We start by eliminating sources of contamination. We use only insulators with 99.5% purity and thermocouple wires manufactured from mined ores, never recycled materials. This rigorous selection process ensures the absolute chemical integrity required for sensitive wafer production processes.
CLEAN ROOM PRECISION
Fabrication takes place in clean room assembly cells featuring laminar flow tables to minimize airborne particles. Our technicians utilize precision laser welding to create microscopic junctions, minimizing heat damage to the wire and ensuring superior structural integrity compared to traditional methods.
VALIDATED RELIABILITY
We have a "test to perform" philosophy, ensuring every sensor undergoes rigorous calibration. Our RvA-accredited ISO/IEC 17025 laboratory delivers precision across a vast range from -196°C to 1,500°C. Adhering to strict ISO 9001 standards with full traceability. This integrated in-house approach eliminates external dependence, securing proven reliability and consistent project delivery.
Learn About Thermocouple Sensors for Epitaxial Applications
Epitaxial Temperature Sensing
1 / 12How does material purity affect semiconductor wafer quality?
To ensure high-quality wafer production and prevent process contamination, sensing wires are manufactured exclusively from mined ores rather than recycled materials. In addition, insulators are required to be 99.5% pure or better and are fired specifically to remove all organic impurities before they enter the assembly stage. These components are then handled in a clean room environment to maintain absolute purity.
What are the benefits of using stabilized platinum alloys in EPI sensors?
Standard platinum wires are prone to grain growth at high temperatures, which creates a "bamboo" structure that leads to mechanical failure or open junctions. Stabilized micro-alloys are used to prevent this grain growth, allowing the sensors to maintain mechanical stability and reliability at extreme temperatures. These specialized alloys can extend the operational lifespan of a sensor by up to 400 times under load compared to standard wire.
Can the cost of these high-value sensors be offset through reclamation?
Yes, a specialized refurbishment and credit program allow you to return used sensors for precious metal reclamation. Historically, many users have overlooked this service, but it provides a wire credit that can be applied to the supply of new, certified sensors. This program allows facilities to obtain new high-precision thermocouples at a fraction of the original cost while supporting environmental objectives.
How does the manufacturing process ensure the integrity of small-diameter wires?
EPI sensors utilize very small diameter wires that are susceptible to damage from traditional joining methods. We utilize precision laser welding to create microscopic junctions, a process that minimizes the Heat Affected Zone (HAZ) and prevents structural damage. Every junction is then microscopically inspected and photographed before and after being positioned against the insulator to document complete manufacturing integrity.
How can a dual-circuit configuration improve the monitoring of epitaxial processes?
A dual-circuit design provides a redundant measurement in the event that one circuit fails during operation. Additionally, these circuits can be used to track sensor drift by populating one of the circuits with a different calibration wire. Because different calibrations drift at different rates, comparing the differential allows operators to make replacement decisions based on objective criteria rather than arbitrary maintenance schedules.
What are the benefits of using sensors that monitor multiple temperature points simultaneously?
Specialized probes allow for the monitoring of three separate temperature points within a single vessel, which is particularly useful during reactor calibration,. These designs often utilize a tapered sheath to ensure the precise location of the measuring junctions. To ensure accuracy at temperatures near 1200°C, these sensors may utilize specialized wires protected from high-temperature oxidation by an inert-gas backfill.
DO YOU HAVE A EPI THERMOCOUPLE PROJECT IN MIND?
REQUEST Brochure
Complete this form below and we will automatically send you our latest brochure.